National Semiconductor Metrology Program : [catalog] /

Bibliographic Details
Previous Title:	National Institute of Standards and Technology. Semiconductor measurement technology
Corporate Authors:	National Semiconductor Metrology Program (U.S.), National Institute of Standards and Technology (U.S.), National Institute of Standards and Technology (U.S.). Office of Microelectronics Programs, Electronics and Electrical Engineering Laboratory (National Institute of Standards and Technology)
Format:	Government Document Serial
Language:	English
Published:	Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, 1995-
Series:	NIST list of publications ; 103.
Subjects:	Semiconductors > Measurement > Bibliography > Catalogs. National Semiconductor Metrology Program (U.S.) > Bibliography > Catalogs.
Online Access:	https://purl.fdlp.gov/GPO/LPS1622

Description
Published:	Mar. 1995-
Item Description:	Address: National Technical Information Service, U.S. Dept. of Commerce, Attn: NTIS Order Clerk, Springfield, VA 22161. Title from cover.
Physical Description:	volumes ; 28 cm. Titles for the latest year (not cumulative) also available via Internet from the EEEL web site. Address as of 9/8/00: http://www.eeel.nist.gov/810.01/; current access is available via PURL.
Publication Frequency:	Annual