Thin-film deposition : principles and practice /

Bibliographic Details
Main Author: Smith, Donald L. (Donald Leonard), 1944-
Format: Book
Language:English
Published: New York : McGraw-Hill, [1995]
Subjects:
Description
Physical Description:xxiii, 616 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0070585024
0071139133 (International ed.)