rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Kinetics and characterization of tungsten CVD processes
  name:
    name part: Ammerlaan, Johannes Andreas Maria.
    role:
      role term: creator
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: ne
    date issued: 1994
    issuance: monographic
  language:
    language term: eng
  language:
    language term: dut
  physical description:
    form: print
    extent: 172 pages : illustrations ; 24 cm.
  note: door Johannes Andreas Maria Ammerlaan.
  note: Summary, postscript and vita in Dutch.
  note: doctoral Technische Universteit Delft 1994.
  note: Includes bibliographical references.
  subject:
    topic: Chemical vapor deposition
  subject:
    topic: Tungsten
  subject:
    topic: Metallic films
  subject:
    topic: Semiconductor films
  identifier: 9062759610
  record info:
    record content source: AZS
    record creation date: 941012
    record change date: 20151003063228.0
    record identifier: in00001229653