Handbook of critical dimension metrology and process control : proceedings of a conference held 28-29 September 1993, Monterey, California /
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash. :
SPIE Optical Engineering Press,
[1994]
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| Series: | Critical reviews of optical science and technology ;
v. CR52. |
| Subjects: |
| Item Description: | "Sponsored by SPIE--the International Society for Optical Engineering." |
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| Physical Description: | x, 358 pages : illustrations ; 27 cm. |
| Bibliography: | Includes bibliographical references. |
| ISBN: | 081941364X 0819413631 (pbk.) |