Society of Photo-optical Instrumentation Engineers. Poland Chapter, Institute of Applied Optics (Warsaw, Poland), Pluta, M., & Szyjer, M. (1994). Diffractometry and scatterometry: 24-28 May 1993. SPIE.
Chicago Style (17th ed.) CitationSociety of Photo-optical Instrumentation Engineers. Poland Chapter, Poland) Institute of Applied Optics (Warsaw, Maksymilian Pluta, and Mariusz Szyjer. Diffractometry and Scatterometry: 24-28 May 1993. Bellingham, Wash., USA: SPIE, 1994.
MLA (9th ed.) CitationSociety of Photo-optical Instrumentation Engineers. Poland Chapter, et al. Diffractometry and Scatterometry: 24-28 May 1993. SPIE, 1994.
Warning: These citations may not always be 100% accurate.