27th International Symposium on Microelectronics : 15-17 November 1994, Boston, Massachusetts /
| Corporate Authors: | , , |
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| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Reston, VA :
The Society,
[1994]
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 2369. |
| Subjects: |
| Item Description: | "Published in cooperation with SPIE--the International Society for Optical Engineering." |
|---|---|
| Physical Description: | xiv, 648 pages : illustrations ; 28 cm. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0930815416 |