rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Manufacturing process control for microelectronic devices and circuits
    sub title: 20-21 October 1994, Austin, Texas
  name:
    name part: Sabnis, Anant G.
  name:
    name part: Society of Photo-optical Instrumentation Engineers
  type of resource: text
  genre: bibliography
  genre: conference publication
  origin info:
    place:
      place term: wau
    date issued: 1994
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: ix, 250 pages : illustrations ; 28 cm.
  note: Anant G. Sabnis, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
  note: Includes bibliographical references and index.
  subject:
    topic: Integrated circuits
    topic: Design and construction
    genre: Congresses
  subject:
    topic: Integrated circuits
    topic: Very large scale integration
    topic: Design and construction
    genre: Congresses
  subject:
    topic: Process control
    genre: Congresses
  related item:
    title info:
      title: Proceedings of SPIE--the International Society for Optical Engineering ; v. 2336
  identifier: 081941669X (pbk.)
  identifier: 94067262
  record info:
    record content source: SCT
    record creation date: 941003
    record change date: 20151002073759.0
    record identifier: in00001202977