Cover Image

Manufacturing process control for microelectronic devices and circuits : 20-21 October 1994, Austin, Texas /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Sabnis, Anant G.
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1994]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 2336.
Subjects:
Integrated circuits > Design and construction > Congresses.
Integrated circuits > Very large scale integration > Design and construction > Congresses.
Process control > Congresses.
Description
Physical Description:ix, 250 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:081941669X (pbk.)