Cover Image

Nanofabrication technologies and device integration : 13-14 April 1994, Lindau, FRG /

Bibliographic Details
Corporate Authors:	Commission of the European Communities. Directorate-General for Science, Research, and Development, European Optical Society, Society of Photo-optical Instrumentation Engineers
Other Authors:	Karthe, Wolfgang
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1994]
Series:	Europto series. Proceedings of SPIE--the International Society for Optical Engineering ; v. 2213.
Subjects:	Nanotechnology > Congresses. Integrated optics > Congresses. Optical instruments > Design and construction > Congresses.

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