Cover Image

Nanofabrication technologies and device integration : 13-14 April 1994, Lindau, FRG /

Bibliographic Details
Corporate Authors: Commission of the European Communities. Directorate-General for Science, Research, and Development, European Optical Society, Society of Photo-optical Instrumentation Engineers
Other Authors: Karthe, Wolfgang
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1994]
Series:Europto series.
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2213.
Subjects:
Nanotechnology > Congresses.
Integrated optics > Congresses.
Optical instruments > Design and construction > Congresses.
Description
Physical Description:ix, 334 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819415170 (pbk.)