Cover Image

Optical/laser microlithography VII : 2-4 March 1994, San Jose, California /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International
Other Authors: Brunner, Timothy A.
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1994]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 2197.
Subjects:
Microlithography > Congresses.
Masks (Electronics) > Congresses.
Optical instruments > Congresses.
Lasers > Industrial applications > Congresses.
Description
Physical Description:xiii, 1008 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819414921 (pbk.)