Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, & Brunner, T. A. (1994). Optical/laser microlithography VII: 2-4 March 1994, San Jose, California. SPIE.
Chicago Style (17th ed.) CitationSociety of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, and Timothy A. Brunner. Optical/laser Microlithography VII: 2-4 March 1994, San Jose, California. Bellingham, Wash., USA: SPIE, 1994.
MLA (9th ed.) CitationSociety of Photo-optical Instrumentation Engineers, et al. Optical/laser Microlithography VII: 2-4 March 1994, San Jose, California. SPIE, 1994.
Warning: These citations may not always be 100% accurate.