APA (7th ed.) Citation

Symposium on Photomask Technology and Management Santa Clara, Calif, & BACUS (Technical group). (1994). 13th Annual Symposium on Photomask Technology and Management: Proceedings : 22-23 September 1993, Santa Clara, California. SPIE--the International Society for Optical Engineering.

Chicago Style (17th ed.) Citation

Symposium on Photomask Technology and Management Santa Clara, Calif, and BACUS (Technical group). 13th Annual Symposium on Photomask Technology and Management: Proceedings : 22-23 September 1993, Santa Clara, California. Bellingham, Wash.: SPIE--the International Society for Optical Engineering, 1994.

MLA (9th ed.) Citation

Symposium on Photomask Technology and Management Santa Clara, Calif, and BACUS (Technical group). 13th Annual Symposium on Photomask Technology and Management: Proceedings : 22-23 September 1993, Santa Clara, California. SPIE--the International Society for Optical Engineering, 1994.