Technology of proximal probe lithography /

Bibliographic Details

Other Authors:	Marrian, Christie R. K.
Format:	Book
Language:	English
Published:	Bellingham, Wash. : SPIE Optical Engineering Press, [1993]
Series:	SPIE institutes for advanced optical technologies ; v. IS 10.
Subjects:	Molecular electronics. Lithography, Electron beam. Probes (Electronic instruments) Nanotechnology.