Handbook of multilevel metallization for integrated circuits : materials, technology, and applications /
| Other Authors: | , , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Park Ridge, N.J., U.S.A. :
Noyes,
[1993]
|
| Series: | Materials science and process technology series.
|
| Subjects: |
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