Defect engineering in semiconductor growth, processing, and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A. /
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| Format: | Book |
| Language: | English |
| Published: |
Pittsburgh, Pa. :
Materials Research Society,
[1992]
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| Series: | Materials Research Society symposia proceedings.
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| Subjects: |
| Physical Description: | xix, 1144 pages : illustrations ; 24 cm. |
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| Bibliography: | Includes bibliographical references and indexes. |
| ISBN: | 1558991573 |
| ISSN: | 0272-9172 ; |