Radio frequency power in plasmas : tenth topical conference, Boston, Ma., April 1993 /
| Corporate Authors: | , |
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| Other Authors: | , |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
New York :
American Institute of Physics,
1994.
|
| Series: | AIP conference proceedings ;
no. 289. |
| Subjects: |
| Physical Description: | xv, 466 pages : illustrations ; 24 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 1563962640 |