rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Process and device modeling for microelectronics
  name:
    name part: Baccarani, Giorgio.
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: ne
    date issued: 1993
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: ix, 422 pages : illustrations ; 25 cm.
  note: edited by Giorgio Baccarani.
  note: Papers originating within research units of the MADESS project, Italy.
  note: Includes bibliographical references.
  subject:
    topic: Integrated circuits
    topic: Mathematical models
  subject:
    topic: Integrated circuits
    topic: Design and construction
    topic: Simulation methods
  subject:
    topic: Integrated circuits
    topic: Mathematical models
  classification: TK7874 .P753 1993
  classification: 621.3815/2/015118
  identifier: 0444899626 (alk. paper)
  identifier: 93028742
  record info:
    record content source: DLC
    record creation date: 930716
    record change date: 20151001073938.0
    record identifier: in00001167073