rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Microelectronic processes, sensors, and controls
    sub title: 27-29 September 1993, Monterey, California
  name:
    name part: Bondur, James.
  name:
    name part: Society of Photo-optical Instrumentation Engineers
  type of resource: text
  genre: bibliography
  genre: conference publication
  origin info:
    place:
      place term: wau
    date issued: 1994
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: viii, 462 pages : illustrations ; 28 cm.
  note: James A. Bondur [and others], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
  note: Includes bibliographical references and index.
  subject:
    topic: Integrated circuits
    topic: Design and construction
    genre: Congresses
  subject:
    topic: Semiconductors
    topic: Design and construction
    genre: Congresses
  subject:
    topic: Integrated circuits
    topic: Heat treatment
    topic: Congresses
  subject:
    topic: Plasma etching
    genre: Congresses
  subject:
    topic: Optical detectors
    genre: Congresses
  related item:
    title info:
      title: Proceedings of SPIE--the International Society for Optical Engineering ; v. 2091
  identifier: 0819413625 (pbk.)
  identifier: 93086455
  record info:
    record content source: SCT
    record creation date: 940318
    record change date: 20151001082105.0
    record identifier: in00001161528