http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
Microelectronic processes, sensors, and controls
27-29 September 1993, Monterey, California
Society of Photo-optical Instrumentation Engineers
viii, 462 pages : illustrations ; 28 cm.
James A. Bondur [and others], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Includes bibliographical references and index.
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2091