APA (7th ed.) Citation

Luft, W., & Tsuo, Y. S. (1993). Hydrogenated amorphous silicon alloy deposition processes. M. Dekker.

Chicago Style (17th ed.) Citation

Luft, Werner, and Y. Simon Tsuo. Hydrogenated Amorphous Silicon Alloy Deposition Processes. New York: M. Dekker, 1993.

MLA (9th ed.) Citation

Luft, Werner, and Y. Simon Tsuo. Hydrogenated Amorphous Silicon Alloy Deposition Processes. M. Dekker, 1993.