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Materials modification by energetic atoms and ions : Symposium held April 28-30, 1992, San Francisco, California, USA /

Bibliographic Details
Corporate Author: Symposium K, "Materials Modifications by Energetic Atoms and Ions" San Francisco, Calif.
Other Authors: Grabowski, Kenneth S.
Format: Conference Proceeding Book
Language:English
Published: Pittsburgh, PA : Materials Research Society, [1992]
Series:Materials Research Society symposia proceedings.
Subjects:
Semiconductors > Etching > Congresses.
Plasma etching > Congresses.
Ion bombardment > Congresses.
Thin films > Congresses.
Description
Physical Description:xiii, 405 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and index.
ISBN:1558991638