Cover Image

Optical/laser microlithography : 3-5 March 1993, San Jose, California /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Cuthbert, John D.
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1993]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 1927.
Subjects:
Lasers > Industrial applications > Congresses.
Optical instruments > Congresses.
Microlithography > Congresses.
Description
Item Description:Spine title: Optical/laser microlithography VI.
Physical Description:2 volumes (x, 933 pages) : illustrations (some color) ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819411612 (pbk.)