Society of Photo-optical Instrumentation Engineers & Cuthbert, J. D. (1993). Optical/laser microlithography: 3-5 March 1993, San Jose, California. SPIE.
Chicago Style (17th ed.) CitationSociety of Photo-optical Instrumentation Engineers and John D. Cuthbert. Optical/laser Microlithography: 3-5 March 1993, San Jose, California. Bellingham, Wash., USA: SPIE, 1993.
MLA (9th ed.) CitationSociety of Photo-optical Instrumentation Engineers and John D. Cuthbert. Optical/laser Microlithography: 3-5 March 1993, San Jose, California. SPIE, 1993.
Warning: These citations may not always be 100% accurate.