Cover Image

Integrated circuit metrology, inspection, and process control VII : 2-4 March 1993, San Jose, California /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Postek, Michael T.
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1993]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 1926.
Subjects:
Integrated circuits > Inspection > Congresses.
Integrated circuits > Measurement > Congresses.
Integrated circuits > Congresses.
Measurement > Congresses.
Description
Physical Description:xi, 594 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819411604 (pbk.)