Society of Photo-optical Instrumentation Engineers & Postek, M. T. (1993). Integrated circuit metrology, inspection, and process control VII: 2-4 March 1993, San Jose, California. SPIE.
Chicago Style (17th ed.) CitationSociety of Photo-optical Instrumentation Engineers and Michael T. Postek. Integrated Circuit Metrology, Inspection, and Process Control VII: 2-4 March 1993, San Jose, California. Bellingham, Wash., USA: SPIE, 1993.
MLA (9th ed.) CitationSociety of Photo-optical Instrumentation Engineers and Michael T. Postek. Integrated Circuit Metrology, Inspection, and Process Control VII: 2-4 March 1993, San Jose, California. SPIE, 1993.
Warning: These citations may not always be 100% accurate.