rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Advances in resist technology and processing X
    sub title: 1-2 March 1993, San Jose, California
  title info:
    title: Advances in resist technology and processing ten
  title info:
    title: Advances in resist technology and processing 10
  name:
    name part: Hinsberg, William D.
  name:
    name part: Society of Photo-optical Instrumentation Engineers
  type of resource: text
  genre: bibliography
  genre: conference publication
  origin info:
    place:
      place term: wau
    date issued: 1993
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xi, 738 pages : illustrations ; 28 cm.
  note: William D. Hinsberg, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
  note: Includes bibliographical references and index.
  subject:
    topic: Photoresistors
    topic: Congresses
  subject:
    topic: Photoresists
    genre: Congresses
  related item:
    title info:
      title: Proceedings of SPIE--the International Society for Optical Engineering ; v. 1925
  identifier: 0819408271 (pbk.)
  identifier: 91061057
  record info:
    record content source: SCT
    record creation date: 931012
    record change date: 20151001051751.0
    record identifier: in00001139674