Handbook of semiconductor wafer cleaning technology : science, technology, and applications /
| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
Park Ridge, N.J. :
Noyes Publications,
[1993]
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| Series: | Materials science and process technology series.
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| Subjects: |
| Physical Description: | 623 pages : illustrations |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0815513313 |