Chemical vapor deposition : principles and applications /
| Other Authors: | , |
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| Format: | Book |
| Language: | English |
| Published: |
London ; San Diego :
Academic Press,
[1993]
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| Subjects: | |
| Online Access: | Table of contents Publisher description |
| Physical Description: | v, 677 pages : illustrations ; 24 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0123496705 9780123496706 |