A compact electron storage ring design /
| Main Author: | |
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| Other Authors: | , , |
| Format: | Thesis Book |
| Language: | English |
| Published: |
1992.
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| Subjects: | |
| Online Access: | Link to OAKTrust copy |
| Abstract: | Electron storage rings are sources of synchrotron radiation in the soft and hard parts of the x-ray spectrum. X-ray lithography is an ideal candidate technology for the production of microelectronic devices with sizes between 0.3-0.5 microns. Industrial x-ray lithography requires the x-ray source, which is the electron storage ring, to be as compact and reliable as possible. In this thesis I review and develop the basic physical principles governing the design of compact electron synchrotrons for x-ray lithography. I explore the various aspects of lattice design for this application. I argue that the optimal storage ring design consists of a four fold symmetric cell lattice with two quadrupole families and 90° zero gradient dipole magnets. I demonstrate that radiation requirements for lithography and the use of zero gradient magnetic dipole fields constrains the lattice to four or more dipole magnets. I develop a lattice design for x-ray lithography following this logic. I then develop a dipole magnet design for a machine using this lattice. Particle tracking data is integrated into the magnet design and used to optimize the end coil configurations of the magnets. I then review the magnet's physical construction and measurement. I develop a cryogenic Hall probe mapping apparatus for this magnet and measure its excitation curves. |
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| Item Description: | Typescript (photocopy). Vita. "Major subject: Physics." |
| Physical Description: | xi, 149 leaves : illustrations ; 29 cm |
| Bibliography: | Includes bibliographical references. |