Cover Image

IEEE micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines, and systems : proceedings /

Bibliographic Details
Corporate Authors: IEEE Robotics and Automation Society, American Society of Mechanical Engineers. Dynamic Systems and Control Division, IEEE Workshop on Micro Electro Mechanical Systems
Format: Conference Proceeding Book
Language:English
Published: [New York] : Piscataway, NJ : Institute of Electrical and Electronics Engineers ; IEEE Service Center, [1993]
Subjects:
Electromechanical devices > Congresses.
Microelectronics > Congresses.
Robotics > Congresses.
Detectors > Congresses.
Actuators > Congresses.
Micromechanics > Congresses.
Description
Item Description:"1993 IEEE Micro Electro Mechanical Systems"--Spine and cover.
"IEEE catalog number 93CH3265-6."
Physical Description:xvii, 294 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:078030957X (softbound)
0780309588 (casebound)
0780309596 (microfiche)