Cover Image

Advanced techniques for integrated circuit processing II : 21-23 September 1992, San Jose, California /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Bondur, James
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1993]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 1803.
Subjects:
Integrated circuits > Design and construction > Congresses.
Description
Physical Description:x, 404 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819410012 (pbk.)