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Rapid thermal processing : science and technology /

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Bibliographic Details
Main Author: Fair, Richard B.
Format: Book
Language:English
Published: Boston : Academic Press, [1993]
Subjects:
Semiconductors > Heat treatment.
Semiconductor doping.
Description
Physical Description:viii, 430 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0122476905 (acid-free paper)