The physics of micro/nano-fabrication /

Bibliographic Details
Main Author:	Brodie, Ivor
Other Authors:	Muray, Julius J.
Format:	Book
Language:	English
Published:	New York : Plenum Press, [1992]
Series:	Microdevices.
Subjects:	Microelectronics. Thin-film circuits. Microelectronics

by Brodie, Ivor
Published 1992

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