rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    non sort: The
    title: physics of micro/nano-fabrication
  name:
    name part: Brodie, Ivor.
    role:
      role term: creator
  name:
    name part: Muray, Julius J.
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: nyu
    date issued: 1992
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xix, 650 pages : illustrations ; 26 cm.
  note: Ivor Brodie and Julius J. Muray.
  note: Includes bibliographical references and indexes.
  subject:
    topic: Microelectronics
  subject:
    topic: Thin-film circuits
  subject:
    topic: Microelectronics
  classification: TK7874 .B725 1992
  classification: 621.381
  related item:
    title info:
      title: Microdevices
  identifier: 0306441462
  identifier: 92028941
  record info:
    record content source: DLC
    record creation date: 920727
    record change date: 20150930070409.0
    record identifier: in00001114682