Metallization : theory and practice for VLSI and ULSI /

Bibliographic Details
Main Author:	Murarka, S. P.
Format:	Book
Language:	English
Published:	Boston : Butterworth-Heinemann, [1993]
Subjects:	Integrated circuits > Very large scale integration. Metallizing.

Description
Physical Description:	vi, 250 pages : illustrations ; 26 cm.
Bibliography:	Includes bibliographical references and index.
ISBN:	0750690011 (acid-free paper)