Cover Image

Selected papers on optical microlithography /

Bibliographic Details
Other Authors: Stover, Harry L.
Format: Book
Language:English
Published: Bellingham, Wash. : SPIE Optical Engineering Press, [1992]
Series:SPIE milestone series ; v. MS 55.
Subjects:
Semiconductors > Design and construction.
Microlithography.
Masks (Electronics)
Description
Item Description:Papers originally published in various journals, 1974-1991.
Physical Description:xviii, 676 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:0819409855 (hard)
0819409863 (soft)