APA (7th ed.) Citation

Stover, H. L. (1992). Selected papers on optical microlithography. SPIE Optical Engineering Press.

Chicago Style (17th ed.) Citation

Stover, Harry L. Selected Papers on Optical Microlithography. Bellingham, Wash.: SPIE Optical Engineering Press, 1992.

MLA (9th ed.) Citation

Stover, Harry L. Selected Papers on Optical Microlithography. SPIE Optical Engineering Press, 1992.

Warning: These citations may not always be 100% accurate.