rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Microelectronics manufacturing diagnostics handbook
  name:
    name part: Landzberg, Abraham H.
    name part: 1929-
  type of resource: text
  origin info:
    place:
      place term: nyu
    date issued: 1993
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xxxi, 633 : illustrations ; 27 cm.
  note: edited by Abraham H. Landzberg.
  note: Includes bibliographical references and index.
  subject:
    topic: Electronic industries
  subject:
    topic: Semiconductors
    topic: Design and construction
  subject:
    topic: Production management
    topic: Quality control
  classification: TK7836 .M52 1992
  classification: 621.381
  identifier: 0442004710
  identifier: 92018936
  record info:
    record content source: DLC
    record creation date: 920518
    record change date: 20150929212904.0
    record identifier: in00001109747