Microelectronics manufacturing diagnostics handbook /
| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
New York :
Van Nostrand Reinhold,
[1993]
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| Subjects: |
| Physical Description: | xxxi, 633 : illustrations ; 27 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0442004710 |