Atomic layer growth and processing : symposium held April 29 - May 1, Anaheim, California, U.S.A. /

Bibliographic Details
Other Authors: Kuech, T. F., Dapkus, P. D., Aoyagi, Y.
Format: Book
Language:English
Published: Pittsburgh : Materials Research Society, [1991]
Series:Materials Research Society symposia proceedings.
Subjects:
Description
Physical Description:xiii, 360 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:1558991166