Atomic layer growth and processing : symposium held April 29 - May 1, Anaheim, California, U.S.A. /
| Other Authors: | , , |
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| Format: | Book |
| Language: | English |
| Published: |
Pittsburgh :
Materials Research Society,
[1991]
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| Series: | Materials Research Society symposia proceedings.
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| Subjects: |
| Physical Description: | xiii, 360 pages : illustrations ; 24 cm. |
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| Bibliography: | Includes bibliographical references and indexes. |
| ISBN: | 1558991166 |