APA (7th ed.) Citation

Kuech, T. F., Dapkus, P. D., & Aoyagi, Y. (1991). Atomic layer growth and processing: Symposium held April 29 - May 1, Anaheim, California, U.S.A. Materials Research Society.

Chicago Style (17th ed.) Citation

Kuech, T. F., P. D. Dapkus, and Y. Aoyagi. Atomic Layer Growth and Processing: Symposium Held April 29 - May 1, Anaheim, California, U.S.A. Pittsburgh: Materials Research Society, 1991.

MLA (9th ed.) Citation

Kuech, T. F., et al. Atomic Layer Growth and Processing: Symposium Held April 29 - May 1, Anaheim, California, U.S.A. Materials Research Society, 1991.