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Bibliographic Details
Corporate Authors: IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop, Institute of Electrical and Electronics Engineers, Semiconductor Equipment and Materials International, IEEE Electron Devices Society, IEEE Components, Hybrids, and Manufacturing Technology Society
Format: Conference Proceeding
Language:English
Published: New York, NY : IEEE, [1990-]
Subjects:
Semiconductors > Design and construction > Congresses.
Semiconductor industry > Congresses.
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Description
Published:1st ('90)-
Item Description:Some issues have also a distinctive theme title.
Published: Mountain View, CA : SEMI, 1993-
Physical Description:volumes : illustrations ; 28 cm.
Also available by subscription, in PDF format, via the World Wide Web.
Publication Frequency:Annual
ISSN:1078-8743