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| LEADER |
00000cam a2200000 a 4500 |
| 001 |
in00001086921 |
| 005 |
20150929110825.0 |
| 008 |
920722s1992 waua b 101 0 eng d |
| 020 |
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|a 0819408271
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| 035 |
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|a (OCoLC)26236325
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| 035 |
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|9 AFQ3357AM
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| 040 |
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|a LHL
|c LHL
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|d UtOrBLW
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| 049 |
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|a TXAM
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| 090 |
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|a TK7874
|b .A25 1992
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| 245 |
0 |
0 |
|a Advances in resist technology and processing IX :
|b 9-10 March, 1992, San Jose, California /
|c Anthony E. Novembre, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
|
| 264 |
|
1 |
|a Bellingham, Wash., USA :
|b SPIE,
|c [1992]
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| 264 |
|
4 |
|c ©1992
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| 300 |
|
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|a xi, 684 pages :
|b illustrations ;
|c 28 cm.
|
| 336 |
|
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|a text
|b txt
|2 rdacontent
|
| 337 |
|
|
|a unmediated
|b n
|2 rdamedia
|
| 338 |
|
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|a volume
|b nc
|2 rdacarrier
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| 490 |
1 |
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|a Proceedings / SPIE--the international society for optical engineering ;
|v v. 1672
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| 500 |
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|a "The papers contained within this proceedings were presented at the ninth conference on Advances in Resist Technology and Processing, held as part of the 1992 SPIE Symposium on Microlithography."--P. xi.
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| 504 |
|
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|a Includes bibliographical references and index.
|
| 650 |
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0 |
|a Photoresistors
|x Congresses.
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| 650 |
|
0 |
|a Photoresists
|v Congresses.
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| 700 |
1 |
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|a Novembre, Anthony E.
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| 710 |
2 |
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|a Society of Photo-optical Instrumentation Engineers.
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| 711 |
2 |
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|a Conference on Advances in Resist Technology and Processing
|n ( (9th :
|d 1992 :
|c San Jose, Calif.)
|
| 740 |
0 |
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|a Advances in resist technology and processing nine.
|
| 740 |
0 |
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|a Advances in resist technology and processing 9.
|
| 830 |
|
0 |
|a Proceedings of SPIE--the International Society for Optical Engineering ;
|v v. 1672.
|
| 999 |
|
|
|a MARS
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| 999 |
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| 952 |
f |
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|p ric
|a Texas A&M University
|b Rellis Campus
|c Joint Library Facility
|d Remote Storage
|t 0
|e TK7874 .A25 1992
|h Library of Congress classification
|i unmediated -- volume
|m A14816040900
|
| 998 |
f |
f |
|a TK7874 .A25 1992
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|