Cover Image

Optical/laser microlithography V : 11-13 March 1992, San Jose, California /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Cuthbert, John D.
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1992]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 1674.
Subjects:
Lasers > Industrial applications > Congresses.
Optical instruments > Congresses.
Microlithography > Congresses.
Description
Physical Description:2 volumes : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.