Spectroscopic characterization techniques for semiconductor technology IV : 25-26 March 1992, Somerset, New Jersey /
| Corporate Author: | |
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash., U.S.A. :
The Society,
[1992]
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| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 1678. |
| Subjects: | |
| Online Access: | https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/1678.toc |
| Physical Description: | ix, 308 pages : illustrations ; 28 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0819408395 |