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Metallization : performance and reliability issues for VLSI and ULSI : 12-13 September 1991, San Jose, California /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Symposium on Microelectronic Processing Integration
Other Authors:	Gildenblat, Gennady Sh, Schwartz, Gary P.
Format:	Conference Proceeding Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1991]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 1596.
Subjects:	Microlithography > Reliability > Congresses. Metal coating > Congresses. Integrated circuits > Materials > Congresses.

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