Metallization : performance and reliability issues for VLSI and ULSI : 12-13 September 1991, San Jose, California /
| Corporate Authors: | , |
|---|---|
| Other Authors: | , |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Bellingham, Wash., USA :
SPIE,
[1991]
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 1596. |
| Subjects: |
| Item Description: | "Part of a two-conference program on Rapid Thermal Processing and Metallization held at SPIE's 1991 Symposium on Microelectronic Processing Integration, 9-13 September 1991, in San Jose, California"--P. v. |
|---|---|
| Physical Description: | vii, 159 pages : illustrations ; 28 cm. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0819407275 |