APA (7th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Symposium on Microelectronic Processing Integration, Gildenblat, G. S., & Schwartz, G. P. (1991). Metallization: Performance and reliability issues for VLSI and ULSI : 12-13 September 1991, San Jose, California. SPIE.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Symposium on Microelectronic Processing Integration, Gennady Sh Gildenblat, and Gary P. Schwartz. Metallization: Performance and Reliability Issues for VLSI and ULSI : 12-13 September 1991, San Jose, California. Bellingham, Wash., USA: SPIE, 1991.

MLA (9th ed.) Citation

Society of Photo-optical Instrumentation Engineers, et al. Metallization: Performance and Reliability Issues for VLSI and ULSI : 12-13 September 1991, San Jose, California. SPIE, 1991.