Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A. /

Bibliographic Details
Corporate Author:	Materials Research Society
Other Authors:	Gelpey, Jeffrey C.
Format:	Book
Language:	English
Published:	Pittsburgh, Pa. : Materials Research Society, [1991]
Series:	Materials Research Society symposia proceedings.
Subjects:	Semiconductors > Heat treatment > Congresses. Semiconductor doping > Congresses. Vapor-plating > Congresses.

Description
Physical Description:	xv, 504 pages : illustrations ; 24 cm.
Bibliography:	Includes bibliographical references and indexes.
ISBN:	1558991182