APA (7th ed.) Citation

Symposium on Photomask Technology Sunnyvale, Calif, & Society of Photo-optical Instrumentation Engineers. (1992). 11th annual Symposium on Photomask Technology: September 25-27, 1991, Sunnyvale, California. SPIE.

Chicago Style (17th ed.) Citation

Symposium on Photomask Technology Sunnyvale, Calif, and Society of Photo-optical Instrumentation Engineers. 11th Annual Symposium on Photomask Technology: September 25-27, 1991, Sunnyvale, California. Bellingham, Wash., USA: SPIE, 1992.

MLA (9th ed.) Citation

Symposium on Photomask Technology Sunnyvale, Calif, and Society of Photo-optical Instrumentation Engineers. 11th Annual Symposium on Photomask Technology: September 25-27, 1991, Sunnyvale, California. SPIE, 1992.